PDMS Microchannel Fabrication

Apr 2017

Overview

Keywords: SU-8 Microchannel Mold, PDMS Elastomer, Elastomer Curing Agent, Cleanroom, Reactive Ion Etcher (RIE), Microtechnology, Nanotechnology, MEMS, NEMS, NUFAB

Procedure

A 10:1 weight ratio of elastomer to curing agent was mixed (20 grams of elastomer and 2 grams of curing agent)
The edges of the silicon wafer with the SU-8 pattern were taped to create a mold
The PDMS is then poured into the mold
Air bubbles were evacuated in a vacuum chamber for 30 minutes
Next the mold and PDMS were baked in an oven at 90°C for 20 minutes (approximately position 3 on the oven)
The PDMS was peeled off from the surface of the coated silicon wafer

Technologies Used

Reactive Ion Etcher (RIE)
PDMS Elastomer
Elastomer Curing Agent
SU-8 Microchannel Mold
Optical Microscope
Vacuum Dessicator
Hotplate